The 80th JSAP Autumn Meeting 2019

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[18p-E304-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 18, 2019 1:45 PM - 4:15 PM E304 (E304)

Hiroshi Ikenoue(Kyushu Univ.), Hitoshi Habuka(Yokohama Natl. Univ.)

3:15 PM - 3:30 PM

[18p-E304-7] Stress Evaluation of Wiggling SiN Pattern by using Raman Spectroscopy

〇(M1)Masato Koharada1, Ryo Yokogawa1,2, Naomi Sawamoto1, Kazutoshi Yoshioka1, Atsushi Ogura1 (1.Meiji Univ., 2.JSPS Research Fellow DC)

Keywords:Raman Spectroscopy