4:00 PM - 6:00 PM
[18p-PA3-10] Propagation characteristics of surface acoustic wave in cover glass/liquid layer/LiNbO3 structure
Keywords:Surface acoustic wave
Digital microfluidic systems are required in the medical and biomedical fields. Surface acoustic wave (SAW) attracts attention as a manipulation technology because it can be agitated. During transport, cleaning is necessary because the liquid component adheres to the substrate surface. Therefore, a three-layer structure of cover glass / liquid layer / LiNbO3 was constructed. However, due to the energy loss of the wave in the liquid layer, there is a problem that the power required for transport increases. In this study, for the purpose of optimization of the three-layer structure, we investigated the propagation characteristics of waves propagating through the three-layer structure from numerical analysis and experiments.