[18p-PA3-1~13] 1.6 Ultrasonics

[18p-PA3-3] Deposition of epitaxial piezoelectric films for high intensity and high frequency ultrasonic transducers

〇MUTSUO ISHIKAWA¹, YOSUKE UCHIDA¹, AYAHO TSUKAMOTO¹, NAO SAITO¹, AKITO ENDO³, SHINTARO YASUI², MARIE TABARU², HIROSHI FUNAKUBO², MINORU KUROSAWA² (1.Toin Univ. Yokohama, 2.Titech, 3.Kishu Giken)

Keywords:Piezoelectric films, Ultrasonic transduceres, High frequency

Prototype transducers were fabricated using the self-supporting hydrothermal KNbO₃ piezoelectric films of 3-types thickness. The frequency characteristics of the prototype transducers were measured by LDV and hydrophone in the degassed water. The resonance frequencies were 6MHz, 12 MHz and 19MHz. And the maximum value of vibration velocity and transmitting ultrasound at resonance frequencies were more than 4m/s and 3MPa. Moreover acoustic streaming and nonlinear acoustics such as cavitation were radiated by high intensity ultrasonic radiation using prototype ultrasonic transducers in above condition.