The 80th JSAP Autumn Meeting 2019

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Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

[18p-PA3-1~13] 1.6 Ultrasonics

Wed. Sep 18, 2019 4:00 PM - 6:00 PM PA3 (PA)

4:00 PM - 6:00 PM

[18p-PA3-7] Film Growth of Highly-Piezoelectric ScAlN Based on Measurement of Negative Ion Bombardment during Sputtering Deposition

〇(M1)Kohei Tominaga1, Shinji Takayanagi1, Takahiko Yanagitani2 (1.Doshisha Univ., 2.Waseda Univ.)

Keywords:Piezoelectric thin film, ScAlN, Negative ion