4:00 PM - 6:00 PM
[18p-PA4-12] Substrate temperature dependence of optical properties of PIG-PECVD deposited a-C:H films
Keywords:Plasma enhanced chemical vapor deposition, Hydrogenated amorphous carbon, Spectroscopic ellipsometry
Poster presentation
6 Thin Films and Surfaces » 6.2 Carbon-based thin films
Wed. Sep 18, 2019 4:00 PM - 6:00 PM PA4 (PA)
4:00 PM - 6:00 PM
Keywords:Plasma enhanced chemical vapor deposition, Hydrogenated amorphous carbon, Spectroscopic ellipsometry