[18p-PA4-1~25] 6.2 Carbon-based thin films

[18p-PA4-24] Laser-induced conductive layer on singlecrystalline diamond

〇Tsuyoshi Yoshitake¹, Eslam Abubakr^2,1, Abdelrahman Zkria^2,1, Yuki Katamune³, Shinya Ohmagari⁴, Kaname Imokawa¹, Hiroshi Ikenoue¹ (1.Kyushu Univ., 2.Aswan Univ., 3.Kyushu Inst. techn., 4.AIST)

Keywords:laser-induced doping, diamond, boron

Diamond represents a promising wide- bandgap semiconductor for high power electronic devices. However, devices have not been realized due to difficulties in the doping process physically and technically. Recently laser irradiation has been a prime candidate as a new doping technique. In this work, we applied the laser-induced doping to singlecrystalline diamond immersed in dopant acid.