The 80th JSAP Autumn Meeting 2019

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[18p-PA4-1~25] 6.2 Carbon-based thin films

Wed. Sep 18, 2019 4:00 PM - 6:00 PM PA4 (PA)

4:00 PM - 6:00 PM

[18p-PA4-7] Preparation and structural analysis of a-CNx:H films formed from the rf-plasma of the benzene-N2-Ar gas mixture

〇Yoshinori Karo1, Haruhiko Ito1, Hidetoshi Saitoh1 (1.Nagaoka Univ.of Tech)

Keywords:Plasma CVD, carbon nitride, amorphous