[18p-PA4-1~25] 6.2 Carbon-based thin films

[18p-PA4-8] Fabrication and structural analysis of high-nitrogen containing a-CN_x:H thin films using radio-frequency plasma CVD of the acetylene-N₂-Ar gas mixture

〇Ryota Watanuki¹, Haruhiko Ito¹ (1.Nagaoka Univ.of Tech)

Keywords:Plasma CVD, amorphous, carbon nitride