4:00 PM - 6:00 PM
[18p-PA4-8] Fabrication and structural analysis of high-nitrogen containing a-CNx:H thin films using radio-frequency plasma CVD of the acetylene-N2-Ar gas mixture
Keywords:Plasma CVD, amorphous, carbon nitride
Poster presentation
6 Thin Films and Surfaces » 6.2 Carbon-based thin films
Wed. Sep 18, 2019 4:00 PM - 6:00 PM PA4 (PA)
4:00 PM - 6:00 PM
Keywords:Plasma CVD, amorphous, carbon nitride