[18p-PA5-1~22] 6.4 Thin films and New materials

[18p-PA5-4] Preparation of titanium- and tungsten-doped vanadium oxide films for bolometer infrared sensors

Shotaro Nakamura¹, Suguru Miyakawa¹, 〇Takahiro Himuro¹, Yoji Saito¹ (1.Seikei Univ.)

Keywords:bolometer, infrared sensor, vanadium oxide

We newly fabricated the Ti- and W-doped vanadium oxide (VO₂) films for bolometric infrared sensors. In this study, we tried to optimize the Ti and W doping content in VO₂ films and investigated their electrical properties.