[18p-PA5-1~22] 6.4 Thin films and New materials

[18p-PA5-8] Gas Sensing Performance of Fibrous Nano Structure Produced by Helium Irradiation

〇Kenzo Ibano¹, Kenya Uehata¹, Issei Hirai¹, Yoshio Ueda¹ (1.Osaka Univ.)

Keywords:oxide semiconductor, plasma, gas sensor

Formation of fibrous nano structure was found in the plasma-wall interaction study of nuclear fusion research. The structure is formed when the surface temperature of metal is kept at 1/3 of its melting point, and the surface is irradiated by helium ions. In this study, we focus on the high complexity and the significantly increased surface area of the fibrous structure which can be favorable for the gas sensing application. Thus, the gas sensing performance of the fibrous nano structure was examined.