[18p-PB4-1~12] 15.7 Crystal characterization, impurities and crystal defects

△ [18p-PB4-1] First principles analysis of H impact on intrinsic point defect behavior
in growing CZ-Si crystal

〇(M1)Takuya Kusunoki¹, Koji Sueoka², Wataru Sugimura³, Masataka Hourai³ (1.Graduate School of Okayama Pref. Univ., 2.Okayama Pref. Univ., 3.SUMCO)

Keywords:point defect, hydrogen, first principles analysis