[18p-PB4-1~12] 15.7 Crystal characterization, impurities and crystal defects

△ [18p-PB4-2] Effect of nitrogen doping on intrinsic point defect behavior in growing CZ-Si crystal

〇(M1)Motoharu Taniguchi¹, Koji Sueoka², Masataka Hourai³ (1.Graduate School of Okayama Pref. Univ., 2.Okayama Pref. Univ., 3.SUMCO)

Keywords:intrinsic point defect, nitrogen, first principles analysis