[18p-PB4-1~12] 15.7 Crystal characterization, impurities and crystal defects

△ [18p-PB4-4] First principles analysis on the impact of surface oxide film on the stability and diffusion barrier in the depth direction of metal atoms

〇(M2)Noriyuki Nonoda¹, Koji Sueoka² (1.Graduate School of Okayama Pref. Univ., 2.Okayama Pref. Univ.)

Keywords:Si (001) surface, metal