[18p-PB5-1~36] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18p-PB5-27] Influence of thermal process on NiO/insulator for p-type transparent TFTs

〇Hiroaki Okada¹, Joonam Kim^1,2, Mutsumi Sugiyama^1,2 (1.Tokyo Univ. Sci., 2.RIST)

Keywords:NiO, TFT, sputter