[18p-PB5-1~36] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

▲ [18p-PB5-31] Fabrication of (001)-Sn₅P₂O₁₀ thin films on quartz by inserting Y₂O₃ buffer layer

〇Michitaka Fukumoto^1,2, Chang Yang^1,3, Wenlei Yu¹, Christian Patzig⁴, Thomas Hoeche⁴, Tetsuya Hasegawa², Michael Lorenz¹, Marius Grundmann¹ (1.Leipzig Univ., 2.Univ. of Tokyo, 3.Wenzhou Medical Univ., 4.Fraunhofer IMWS)

Keywords:transparent conductive oxides, pulsed laser deposition