[18p-PB5-1~36] 21.1 合同セッションＫ 「ワイドギャップ酸化物半導体材料・デバイス」

▲ [18p-PB5-8] Role of water additive in the synthesis of AlO_x by mist-CVD

〇Arifuzzaman Rajib Rajib¹、Takanori Kuroki¹、Koki Imai¹、Shunji Kurosu²、Tomofumi Ukai²、Yasuhiko Fujii²、Masahide Tokuda²、Tatsuro Hanajiri²、Ryo Ishikawa¹、Hajime Shirai¹ (1.Saitama Univ.、2.Toyo Univ.)

キーワード：mist-CVD, Alumina, Water addition