[Plasma Electronics Award Speech] Layer-by-layer etching of LaAlSiO<sub>x</sub>

Presentation information

Oral presentation

8 Plasma Electronics » 8.8 Plasma Electronics Award Speech

Thu. Sep 19, 2019 9:30 AM - 10:30 AM B32 (B32)

10:00 AM - 10:30 AM

〇Mitsuhiro Omura¹, Kazuhito Furumoto¹, Kazuhisa Matsuda¹, Toshiyuki Sasaki¹, Itsuko Sakai¹, Hisataka Hayashi¹ (1.Toshiba Memory)

Keywords:dry etching