[19a-C213-1~7] 2.2 Detection systems

[19a-C213-2] X-ray detector using 4H-SiC epitaxial layer

〇Atsuki Miyata¹, Daiki Saito¹, Takuya Hoshii¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui², Kuniyuki Kakushima¹ (1.Tokyo Tech.School of Eng., 2.Tokyo Tech. IIR)

Keywords:radiation, detector, semiconductor