[19a-E208-1~10] 【CS.3】 Code-sharing Session of 3.10 & 3.11 & 9.2 & 11.5 & 13.6

[19a-E208-9] Fabrication and measurement of superconducting qubits consisting of fully-epitaxial NbN-based Josephson junctions

〇Hirotaka Terai¹, Sunmi Kim¹, Tomoko Fuse¹, Wei Qiu¹, Taro Yamashita^2,3, Fumiki Yoshihara¹, Kouishi Semba¹ (1.NICT, 2.Nagoya Univ., 3.JST PRESTO)

Keywords:Superconducting qubit, Niobium nitride, Rabi oscillation

To improve the coherence time of superconducting qubit, we developed a fabrication technology of fully-epitaxial NbN/AlN/NbN Josephson junctions on Si wafers using TiN buffer layers. We fabricated and measured transmon qubits using this junction technology and succeeded in the observation of clear Rabi oscillations. The decay time of the Rabi oscillation was estimated to be 1.2 us.