Two-axis resonant micromirror for omnidirectional scanning

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Thu. Sep 19, 2019 9:00 AM - 12:00 PM E304 (E304)

Reo Kometani(Univ. of Tokyo), Fukushima Takafumi(Tohoku University)

9:30 AM - 9:45 AM

〇Katsuya Suzuki¹, Takashi Sasaki¹, Kazuhiro Hane¹ (1.Tohoku Univ.)

Keywords:MEMS