The 80th JSAP Autumn Meeting 2019

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[19a-E305-1~12] 13.3 Insulator technology

Thu. Sep 19, 2019 9:00 AM - 12:15 PM E305 (E305)

Shosuke Fujii(Toshiba Memory), Yasushi Hotta(Univ. of Hyogo)

9:00 AM - 9:15 AM

[19a-E305-1] TEM Tracking Study of Silicon Nanopillar Oxidation

〇Takuto Wako1, Hiroaki Kariyazaki2, Makoto Kuroda1, Satoru Miyamoto1, Hiroyuki Fujimori2, Tetsuo Endoh3,4, Kohei Itoh1 (1.Keio Univ., 2.GlobalWafers Japan, 3.CIES Tohoku Univ., 4.JST-ACCEL)

Keywords:Si nanopillar, vertical BC-MOSFET, oxidation