Takuto Wako

→ Search for Takuto Wako in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:15 PM E305 (E305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19a-E305-1~12] 13.3 Insulator technology

9:00 AM - 9:15 AM

[19a-E305-1] TEM Tracking Study of Silicon Nanopillar Oxidation

〇Takuto Wako¹, Hiroaki Kariyazaki², Makoto Kuroda¹, Satoru Miyamoto¹, Hiroyuki Fujimori², Tetsuo Endoh^3,4, Kohei Itoh¹ (1.Keio Univ., 2.GlobalWafers Japan, 3.CIES Tohoku Univ., 4.JST-ACCEL)

▲