〇Takuto Wako¹, Hiroaki Kariyazaki², Makoto Kuroda¹, Satoru Miyamoto¹, Hiroyuki Fujimori², Tetsuo Endoh^3,4, Kohei Itoh¹ (1.Keio Univ., 2.GlobalWafers Japan, 3.CIES Tohoku Univ., 4.JST-ACCEL)

〇SANghee YOON¹, Kimihiko Kato¹, Chiaki Yokoyama¹, Daehwan Ahn¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Tokyo University)

〇Kazuki Kusafuka¹, Sunglin Tsai¹, Takuya Hoshii¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui², Kuniyuki Kakushima¹ (1.Tokyo Tech. School of Eng., 2.Tokyo Tech. IIR)

〇Kazuki Harada¹, Yositaka Iwazaki¹, Tomo Ueno¹ (1.TAT)

〇Hiroshi Nohira¹, Reito Wada¹, Akira Yasui², Noriyuki Miyata³ (1.Tokyo City Univ., 2.JASRI, 3.AIST)

〇Shutaro Asanuma¹, Kyoko Sumita¹, Yusuke Miyaguchi², Kazumasa Hotta², Takehito Jimbo², Kazuya Saito², Noriyuki Miyata¹ (1.AIST, 2.ULVAC)

〇Ryota Teragaki¹, Kohei Kobayashi¹, Haruhiko Yoshida¹, Koji Arafune¹, Teruo Kanki², Yasushi Hotta¹ (1.Univ. of Hyogo, 2.ISIR-Sanken)

〇Kohei Kobayashi¹, Ryota Teragaki¹, Haruhiko Yoshida¹, Koji Arafune¹, Yasushi Hotta¹ (1.Univ. of Hyogo)

〇Marina Yamaguchi¹, Shosuke Fujii¹, Shoichi Kabuyanagi¹, Yuuichi Kamimuta¹, Tsunehiro Ino¹, Yasushi Nakasaki¹, Riichiro Takaishi¹, Reika Ichihara¹, Masumi Saitoh¹ (1.Toshiba Memory Corp.)

〇Kasidit Toprasertpong¹, Kento Tahara¹, Taichiro Fukui¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. Tokyo)

〇Kento Tahara¹, Kato Kimihiko¹, Toprasertpong Kasidit¹, Takenaka Mitsuru¹, Takagi Shinichi¹ (1.Univ.Tokyo, Faculty of engineering)

〇(M2)Chenyu Liao¹, Kasidit Toprasertpong¹, Taichirou Fukui¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.The Univ. of Tokyo)