Kento Tahara

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:15 PM E305 (E305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19a-E305-1~12] 13.3 Insulator technology

11:45 AM - 12:00 PM

[19a-E305-11] Study of annealing condition for improving quality of Si/Hf_0.5Zr_0.5O₂interface

〇Kento Tahara¹, Kato Kimihiko¹, Toprasertpong Kasidit¹, Takenaka Mitsuru¹, Takagi Shinichi¹ (1.Univ.Tokyo, Faculty of engineering)