Shutaro Asanuma

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:15 PM E305 (E305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19a-E305-1~12] 13.3 Insulator technology

10:15 AM - 10:30 AM

[19a-E305-6] Interface dipole modulation in HfO₂/TiO₂/SiO₂ structures prepared by ALD

〇Shutaro Asanuma¹, Kyoko Sumita¹, Yusuke Miyaguchi², Kazumasa Hotta², Takehito Jimbo², Kazuya Saito², Noriyuki Miyata¹ (1.AIST, 2.ULVAC)