Kazuki Kusafuka

→ Search for Kazuki Kusafuka in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:15 PM E305 (E305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19a-E305-1~12] 13.3 Insulator technology

9:30 AM - 9:45 AM

[19a-E305-3] Leakage current of sputter fabricated AlScN film

〇Kazuki Kusafuka¹, Sunglin Tsai¹, Takuya Hoshii¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui², Kuniyuki Kakushima¹ (1.Tokyo Tech. School of Eng., 2.Tokyo Tech. IIR)

▲