Kazuki Harada

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Speaker, Author, Co-Author

Thu. Sep 19, 2019 9:00 AM - 12:15 PM E305 (E305)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[19a-E305-1~12] 13.3 Insulator technology

9:45 AM - 10:00 AM

[19a-E305-4] Inspection and evaluation of chemical solution oxidation methods for metal / Si structures

〇Kazuki Harada¹, Yositaka Iwazaki¹, Tomo Ueno¹ (1.TAT)