Presentation information

Tweet

Oral presentation

13 Semiconductors » 13.3 Insulator technology

[19a-E305-1~12] 13.3 Insulator technology

Thu. Sep 19, 2019 9:00 AM - 12:15 PM E305 (E305)

Shosuke Fujii(Toshiba Memory), Yasushi Hotta(Univ. of Hyogo)

9:45 AM - 10:00 AM

[19a-E305-4] Inspection and evaluation of chemical solution oxidation methods for metal / Si structures

〇Kazuki Harada¹, Yositaka Iwazaki¹, Tomo Ueno¹ (1.TAT)

Keywords:semiconductor