[19a-E311-1~8] 6.3 Oxide electronics

△ [19a-E311-5] Optical properties and dielectric constants of amorphous MoO_3-x and W_yMo_1-yO_3-x films

〇(M1)Shota Chomei¹, Risa Tatewaki¹, Junjun Jia², Makoto Kashiwagi¹, Yuzo Shigesato¹ (1.Aoyama Gakuin Univ., 2.Waseda Univ.)

Keywords:molybdenum oxide, dielectric constants, tungsten-molybdenum oxide

Molybdenum trioxide (MoO₃) has 2 different crystalline structures, such as the thermodynamically stable α-MoO₃ and the metastable β-MoO₃. Amorphous molybdenum oxide (a-MoO₃) has been known as electrochromic material, which color turns from colorless to blue by electrochemical or photochemical reductions. This coloration has been explained in terms of small polaron absorption. In this study, we investigate the effect of the structure of the film and the formation of mixed oxide on dielectric function of molybdenum oxide films.
As the substrate temperature increased, polaron stabilization energy (PSE) of MoO_3-x films tended to decrease. Compared with pure MoO_3-x, W_yMo_1-yO_3-x has a bigger PSE.