The 80th JSAP Autumn Meeting 2019

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[19a-E312-1~9] 6.2 Carbon-based thin films

Thu. Sep 19, 2019 9:30 AM - 12:00 PM E312 (E312)

Masami Aono(Kagoshima Univ.), Hidetoshi Saitoh(Nagaoka Univ. of Tech.)

9:30 AM - 9:45 AM

[19a-E312-1] Structure and electrical conduction properties in a-C:H films

〇(M2)Masashi Tomidokoro1, Sarayut Tunmee2, Hideki Nakajima2, Ukit Rittihong2, Ratchadaporn Supruangnet2, Yuki Hirata1, Naoto Ohtake1, Hiroki Akasaka1 (1.Tokyo Inst. of Tech., 2.SLRI)

Keywords:amorphous carbon film, activation energy