Effect of Hydrogen on the Properties of BCN Films Prepared by Magnetron Sputtering

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

Thu. Sep 19, 2019 9:30 AM - 12:00 PM E312 (E312)

Masami Aono(Kagoshima Univ.), Hidetoshi Saitoh(Nagaoka Univ. of Tech.)

10:30 AM - 10:45 AM

〇Ryu Taniguchi¹, Haruto Koriyama¹, Yoshiharu Enta¹, Yasuyuki Kobayashi¹, Hideki Nakazawa¹ (1.Hirosaki Univ.)

Keywords:BCN, Hydrogen, Magnetron sputtering