[19a-E312-1~9] 6.2 Carbon-based thin films

[19a-E312-4] Influence of increased plasma density on the structure of a - C: H films deposited by plasma CVD (Ⅱ)

〇(M2)Miyu Furuhashi¹, Hiroyuki Kousaka², Tatsuya Furuki² (1.Gifu Univ.Grad.Sch., 2.Gifu Univ)

Keywords:Diamond-like Carbon films, Hydrogenated amorphous carbon films

Ultrahigh-speed DLC coating is achieved by high-density plasma generated by microwave power absorption at around ion sheath formed along substrate surface. In our previous work, we investigated the influence of ultrahigh-speed DLC coating on the film structure and reported that ultrahigh-speed DLC coating decreases the hydrogen content in the film. From this result, it is expected that the hydrogen content in the film can be reduced by further increasing the plasma density at higher microwave power absorption. In order to verify the hypothesis, in this work, film formation was performed under different plasma density conditions where plasma density is increased by increasing the peak power of pulsed microwave input. Contrary to expectation, the hydrogen content in the film increased with increasing microwave power.