[19a-E313-1~10] 15.5 Group IV crystals and alloys

[19a-E313-7] TFT operation of solid-phase crystallized Ge thin films and investigation of Sn doping effects

〇Kenta Moto^1,2, Keisuke Yamamoto³, Toshifumi Imajo^1,2, Takashi Suemasu¹, Hiroshi Nakashima⁴, Kaoru Toko¹ (1.Univ. of Tsukuba, 2.JSPS Research Fellow, 3.IGSES, Kyushu Univ., 4.GIC, Kyushu Univ.)

Keywords:GeSn, thin-film transistor, solid-phase crystallization