[19a-N304-1~10] 3.7 Laser processing

[19a-N304-3] Fabrication of Microswelling Structure on Silicone Rubber Using ArF Excimer Laser

〇Misaki Yokoyama¹, Tsuyoshi Yoshida¹, Nobuyuki Matsuki², Masayuki Okoshi¹ (1.National Defense Academy, 2.Kanagawa Univ.)

Keywords:ArF excimer laser, Silicone rubber

Silicone rubber is widely used in industry and medical field because of its useful properties such as heat resistance, weather resistance and biocompatibility.In previous work, the fabrication of super-hydrophobic silicone rubber surface having periodic microswelling structures by 193 nm ArF excimer laser irradiation was reported.For the height control of the periodic microswelling structures, the height dependences for various laser parameters were investigated.Interestingly, it was revealed that the height of the periodic microswelling structures depends on the pulse repetition rate of ArF laser.