[19a-N304-1~10] 3.7 Laser processing

[19a-N304-4] Fabrication of Micro-Suction Cup Structure on Silicone Rubber by ArF Excimer Laser

〇Masayuki Okoshi¹, Tsuyoshi Yoshida¹ (1.National Defense Academy)

Keywords:silicone rubber, micro-suction cup structure, ArF excimer laser

Periodic micro-suction cup structure of silicone approximately 1 micron diameter and 2 micron height at regular intervals of 2.5 micron was directly fabricated by ArF excimer laser. The laser was focused on Al-coated silicone by each silica microsphere 2.5 micron diameter, which covered the entire surface. The silicone underneath each microsphere photochemically swelled, after laser-ablating aluminum to limit a diameter of the swelling. Also, the aluminum enabled to adjust a focal point to the surface of silicone to form a hole approximately 0.5 micron diameter centered at each the swelled silicone. The fabricated micro-suction cup structure of silicone showed superhydrophobicity.