[19a-PA3-1~10] 3.13 Semiconductor optical devices

[19a-PA3-7] Mode calculation of optical microcavity with tilted mirrors

〇Yuma Kitagawa¹, Yuta Suzuki¹, Shin-ichirou Tezuka¹ (1.Yokogawa electric corporation)

Keywords:optical microcavity, tunable laser, VCSEL

We have been developing a tunable laser, MEMS-VCSEL, which is fabricated by bonding a MEMS chip and a half-VCSEL chip. Our MEMS-VCSEL shows some useful features such as a single-mode operation and a wide tuning range over 50 nm without any mode-hop in the wavelength range of 1.5 - 1.7 um. To calculate a mode profile of such a microcavity, our group demonstrated an optical propagation formula based on Rayleigh-Sommerfeld diffraction without paraxial approximation. Fox-Li method which is well-known for a calculation of Fabry-Perot resonator was applied to the formula to obtain mode profiles and diffraction loss in our previous report. However, the effect of mirror tilt on mode calculation was not considered because it was assumed that the two mirrors are parallel. Here we present the integral kernel including the effect of mirror tilt and the result of the mode calculation by using the kernel and Fox-Li method.