[19a-PA4-1~14] 16.3 シリコン系太陽電池

[19a-PA4-1] Effect of annealing temperatures on surface passivation quality of Cat-CVD p-a-Si on c-Si

〇(P)Tu ThiCam Huynh¹、Keisuke Ohdaira¹、Hideki Matsumura¹ (1.JAIST)

キーワード：Cat-CVD p-a-Si, thermal resistance, surface passivation