Evaluation and optimization of titanium nitride thin films by atomic layer deposition for superconducting quantum circuit applications

Presentation information

Poster presentation

11 Superconductivity » 11 Superconductivity (Poster)

Thu. Sep 19, 2019 9:30 AM - 11:30 AM PB2 (PB)

9:30 AM - 11:30 AM

〇Kazumasa Makise¹, Go Fujii¹, Masahiro Ukibe¹ (1.AIST)

Keywords:Atomic layer deposition, thin films, Titanium nitride