Nano Patterning and Observation Using Helium Ion Microscope, Usage examples (2) at Osaka University

Kimihiro Norizawa

Presentation information

Symposium (Oral)

Symposium (technical) » Advanced ion microscopy? Application for future nano scale materials and devices

[19p-E302-1~8] Advanced ion microscopy? Application for future nano scale materials and devices

Thu. Sep 19, 2019 1:30 PM - 5:30 PM E302 (E302)

Shu Nakaharai(NIMS), Reo Kometani(Univ. of Tokyo), Hiroshi Mizuta(JAIST), Shinichi Ogawa(AIST)

4:00 PM - 4:30 PM

▲ [19p-E302-6] Nano Patterning and Observation Using Helium Ion Microscope, Usage examples (2) at Osaka University

〇Kimihiro Norizawa¹ (1.Osaka Univ.)

Keywords:Helium Ion Microscope, HIM, share use

Helium Ion Microscope has been installed to Nanotechnology Open Facilities at Osaka University in 2014 and is operating as a shared equipment in MEXT Nanotechnology Platform project. In this presentation, examples of use of helium ion microscope at Osaka University will be introduced.