Reo Kometani

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Chairperson, etc.

Thu. Sep 19, 2019 1:30 PM - 5:30 PM E302 (E302)

Symposium (Oral)
| Symposium (technical)
| Advanced ion microscopy? Application for future nano scale materials and devices

[19p-E302-1~8] Advanced ion microscopy? Application for future nano scale materials and devices

Shu Nakaharai(NIMS), Reo Kometani(Univ. of Tokyo), Hiroshi Mizuta(JAIST), Shinichi Ogawa(AIST)

Thu. Sep 19, 2019 9:00 AM - 12:00 PM E304 (E304)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[19a-E304-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Reo Kometani(Univ. of Tokyo), Fukushima Takafumi(Tohoku University)