The 80th JSAP Autumn Meeting 2019

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[19p-E305-1~15] 13.3 Insulator technology

Thu. Sep 19, 2019 1:45 PM - 5:45 PM E305 (E305)

Toshifumi Irisawa(AIST), Kiyoteru Kobayashi(Tokai Univ.)

3:15 PM - 3:30 PM

[19p-E305-7] Electrical Characteristics of MOS Capacitors with Y2O3/SiO2 Dielectric Stack

〇Jinhan Song1, Atsuhiro Ohta1, Takuya Hoshii1, Hitoshi Wakabayashi1, Kazuo Tsutsui2, Kuniyuki Kakushima1 (1.Tokyo Tech. School of Eng., 2.Tokyo Tech. IIR)

Keywords:yttium oxide, silicate, capacitor