[19p-E318-1~10] 7.1 X-ray technologies

[19p-E318-2] Soft X-ray high diffraction efficiency and wide acceptance angle laminar type W/C multilayer diffraction gratings designed for 200-900 eV range (II)

〇Masato Koike¹, Tadashi Hatano², Masami Terauchi², Alexander Pirozhkov¹, Nobukazu Hayashi³, Hiroyuki Sasai³, Tetsuya Nagano³ (1.QuBS,QST, 2.IMRAM, Tohoku Univ., 3.Device Dept., Shimadzu Corp.)

Keywords:diffraction grating, soft X-ray multilayer, spectral resolution

A method to improve the diffraction efficiency in a wide energy region centered on Fe-L emission (705.0 eV, 1.76 nm) by depositing a soft X-ray multilayer on a laminar diffraction grating and reducing the incident angle was discussed in the last report. However, as the incident angle decreases, the angular dispersion also decreases, resulting in a problem of reduced spectral resolution. To overcome this problem, we have investigated the method to enhance spectral resolution by increasing the groove density of the grating.