[19p-PB1-1~34] 12.7 Biomedical Engineering and Biochips

△ [19p-PB1-33] Fabrication of MEMS structure as ion diffusion suppressor for high resolution ion imaging.

〇(M1)Chinatsu Kawakami¹, Yuta Ogaeri¹, Takeshi Hizawa¹, Eiji Shigetomi², Youichi Shinozaki², Tatsuya Iwata¹, Toshihiko Noda¹, Kazuhiro Takahashi¹, Schuichi Koizumi², Kazuaki Sawada¹ (1.Toyohashi Univ. of Tech., 2.Yamanashi Univ.)

Keywords:ion image sensor, pH imaging, MEMS structure

In our laboratory, the 2 µm pitch ion image sensor was fabricated to observe the neural transmitters diffusion from the very small area of the hippocampal slice. However, the chemical crosstalk among adjacent pixels caused by the ion diffusion in the solution was a problem and it reduced the spatial resolution of the sensor.
In this study, we propose the barrel array structure to suppress the ion diffusion, and its fabrication process for 2 µm pitch structure by using the photolithography technique and RIE process.