Effects of the doping species on β-Ga<sub>2</sub>O<sub>3</sub> dry etching

Presentation information

Poster presentation

13 Semiconductors » 13.7 Compound and power electron devices and process technology

Thu. Sep 19, 2019 1:30 PM - 3:30 PM PB3 (PB)

1:30 PM - 3:30 PM

〇(M1)Yuuki Moriyama¹, Satoko Shinkai² (1.Kyuukou Univ, 2.Kyuukou Micro)

Keywords:Ga2O3