The 80th JSAP Autumn Meeting 2019

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Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[20a-C310-1~12] 6.4 Thin films and New materials

Fri. Sep 20, 2019 9:00 AM - 12:15 PM C310 (C310)

Yuji Muraoka(Okayama Univ.), Nobuyuki Iwata(Nihon Univ.)

9:00 AM - 9:15 AM

[20a-C310-1] internal stress of low refractive index sio2 optical thin films by electron beam and sputtering 2

〇Kei Yoshizawa1, Syou Ro1, Hiroshi Murotani1 (1.Tokai Univ.)

Keywords:combination coating, sio2, internal stress