Fabrication of lateral compositionally graded films with dual PLD and observation of phase boundaries

Joe Sakai; Alba Fuentes; Pablo Vales; Jose M C Roque; Jessica Padilla-Pantoja; Guillaume Sauthier; Jose Santiso; Gustau Catalan

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[20a-C310-1~12] 6.4 Thin films and New materials

Fri. Sep 20, 2019 9:00 AM - 12:15 PM C310 (C310)

Yuji Muraoka(Okayama Univ.), Nobuyuki Iwata(Nihon Univ.)

9:15 AM - 9:30 AM

[20a-C310-2] Fabrication of lateral compositionally graded films with dual PLD and observation of phase boundaries

〇Joe Sakai¹, Alba Fuentes¹, Pablo Vales¹, Jose M C Roque¹, Jessica Padilla-Pantoja¹, Guillaume Sauthier¹, Jose Santiso¹, Gustau Catalan¹ (1.ICN2)

Keywords:compositionally graded films, dual PLD, PZT

Lateral compositionally graded PbZr_xTi_1-xO₃ films were prepared with a dual PLD technique. Their composition, surface morphology, crystal structure, and electronic properties were obseraved at different points on the graded films.