[20a-C310-1~12] 6.4 Thin films and New materials

[20a-C310-7] Influence of Ta₂O₅ protective film on electrochromic properties of NiO_x thin film in Nafion electrolyte

〇Chihiro Nakai¹, Yoshio Abe¹, Midori Kawamura¹, Kyung Ho Kim¹, Takayuki Kiba¹ (1.Kitami Inst. Tech.)

Keywords:electrochromic, protective film, electrolyte

A Ta₂O₅ protective film was laminated on a NiO_x thin film using reactive sputtering method. The effect of the dissolution prevention of the NiO_x thin film in an electrolytic solution and its EC characteristics were evaluated. By laminating the protective film, the dissolution of the NiO_x thin film was prevented and the cycle durability was improved as compared with the NiO_x thin film without the protective film. In addition, the color change of the NiO_x thin film was also confirmed. Since the film thickness of the Ta₂O₅ thin film was as thin as 10 nm, it is considered that sufficient ion diffusion to the NiO_x thin film occurs.