[20a-E203-1~12] 7.5 Ion beams

△ [20a-E203-3] Piezoelectric properties of sputter-ScAlN thin films grown on CVD synthesized graphene

〇(M1)Ryosuke Amano^1,2, Takahiko Yanagitani^1,2,3 (1.Waseda Univ., 2.ZAIKEN, 3.JST-PREST)

Keywords:piezoelectric thin film, graphene, sputtering

High mechanical quality factor (Q_m) is required for RF filters. Single crystalline piezoelectric film is ideal for Film Bulk Acoustic Resonator (FBAR) filters because of their expected high Q_m. ScAlN thin film was attempted to grown on graphene. In this paper, we report k_t² and crystallographic property of ScAlN thin film grown on graphene.