[20a-E216-1~6] 10.1 新物質・新機能創成（作製・評価技術）

▲ [20a-E216-1] Ti buffer layer effect on crystal structure of annealed Co/Pt thin films

〇Ryo Toyama¹、Shiro Kawachi^1,2、Soshi Iimura¹、Jun-ichi Yamaura^1,2、Youichi Murakami^1,2、Hideo Hosono¹、Yutaka Majima¹ (1.Tokyo Institute of Technology、2.KEK)

キーワード：CoPt, thin film, buffer layer

In this study, we fabricate Co/Pt thin films onto Al₂O₃ substrates with and without Ti buffer layer by electron-beam evaporation to analyze Ti buffer layer effect on crystal structure of annealed CoPt thin films.